Methods of fabricating OLED panel with inorganic pixel encapsulating barrier

ABSTRACT

Embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. The device includes a plurality of sub-pixels, each sub-pixel of the plurality of sub-pixels defined by adjacent pixel-defining layer (PDL) structures with inorganic overhang structures disposed on the PDL structures, each sub-pixel having an anode, organic light-emitting diode (OLED) material disposed on the anode, and a cathode disposed on the OLED material. The device is made by a process including the steps of: depositing the OLED material and the cathode by evaporation deposition, and depositing an encapsulation layer disposed over the cathode.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority to U.S. Provisional Patent ApplicationSer. No. 63/075,025, filed on Sep. 4, 2020, U.S. Provisional PatentApplication Ser. No. 63/075,028, filed on Sep. 4, 2020, and U.S.Provisional Patent Application Ser. No. 63/084,445, filed on Sep. 28,2020, which are herein incorporated by reference.

BACKGROUND Field

Embodiments described herein generally relate to a display. Morespecifically, embodiments described herein relate to sub-pixel circuitsand methods of forming sub-pixel circuits that may be utilized in adisplay such as an organic light-emitting diode (OLED) display.

Description of the Related Art

Input devices including display devices may be used in a variety ofelectronic systems. An organic light-emitting diode (OLED) is alight-emitting diode (LED) in which the emissive electroluminescentlayer is a film of an organic compound that emits light in response toan electric current. OLED devices are classified as bottom emissiondevices if light emitted passes through the transparent orsemi-transparent bottom electrode and substrate on which the panel wasmanufactured. Top emission devices are classified based on whether ornot the light emitted from the OLED device exits through the lid that isadded following the fabrication of the device. OLEDs are used to createdisplay devices in many electronics today. Today's electronicsmanufacturers are pushing these display devices to shrink in size whileproviding higher resolution than just a few years ago.

OLED pixel patterning is currently based on a process that restrictspanel size, pixel resolution, and substrate size. Rather than utilizinga fine metal mask, photo lithography should be used to pattern pixels.Currently, OLED pixel patterning requires lifting off organic materialafter the patterning process. When lifted off, the organic materialleaves behind a particle issue that disrupts OLED performance.Accordingly, what is needed in the art are sub-pixel circuits andmethods of forming sub-pixel circuits to increase pixel-per-inch andprovide improved OLED performance.

SUMMARY

In one embodiment, a device is provided. The device includes a pluralityof sub-pixels, each sub-pixel of the plurality of sub-pixels defined byadjacent pixel-defining layer (PDL) structures with inorganic overhangstructures disposed on the PDL structures, each sub-pixel having ananode, organic light-emitting diode (OLED) material disposed on theanode, and a cathode disposed on the OLED material. The device is madeby a process including the steps of: depositing the OLED material usingevaporation deposition over a substrate, the OLED material disposed overand in contact with the anode, depositing a cathode using evaporationdeposition, the cathode disposed over the OLED material and extendingunder the inorganic overhang structures adjacent to each sub-pixel, anddepositing an encapsulation layer disposed over the cathode, theencapsulation layer extending under at least a portion of the inorganicoverhang structures and along a sidewall of the inorganic overhangstructures.

In another embodiment, a method of forming a device is provided. Themethod includes providing a substrate having an anode, adjacentpixel-defining layer (PDL) structures disposed over the substrate anddefining sub-pixels of the device, and inorganic overhang structuresdisposed over an upper surface of the PDL structures, depositing OLEDmaterial using evaporation deposition in one or more of the sub-pixelsof the device, and depositing a cathode over the OLED material, whereinthe inorganic overhang structures define deposition angles such thatboth the OLED material and the cathode extend under the inorganicoverhang structures.

In yet another embodiment, a method of forming a device is provided. Themethod includes providing a substrate having an anode, adjacentpixel-defining layer (PDL) structures disposed over the substrate anddefining sub-pixels of the device, and inorganic overhang structuresdisposed on an upper surface of the PDL structures, each inorganicoverhang structure has a lower portion disposed on a upper surface of aPDL structure of the PDL structures, and a upper portion disposed on thelower portion, the upper portion including an underside edge extendingpast a sidewall of the lower portion. An organic light-emitting diode(OLED) material is disposed over the anode by evaporation deposition,the OLED material having an OLED edge defined by the underside edge ofthe upper portion such that the OLED material does not contact the lowerportion. A cathode disposed over the OLED material by evaporationdeposition, the cathode having an cathode edge defined by the undersideedge of the upper portion such that the extending under the upperportion and cathode contacts one or more of an assistant cathodedisposed under the lower portion or part of the sidewall of the lowerportion.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentdisclosure can be understood in detail, a more particular description ofthe disclosure, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlyexemplary embodiments and are therefore not to be considered limiting ofits scope, and may admit to other equally effective embodiments.

FIG. 1A is a schematic, cross-sectional view of a sub-pixel circuithaving a plugless arrangement according to embodiments.

FIG. 1B is a schematic, cross-sectional view of a sub-pixel circuithaving a plug arrangement according to embodiments.

FIG. 1C is a schematic, top sectional view of a sub-pixel circuit havinga dot-type architecture according to embodiments.

FIG. 1D is a schematic, cross-sectional view of a sub-pixel circuithaving a line-type architecture according to embodiments.

FIG. 2 is a schematic, cross-sectional view of an inorganic overhangstructure of a sub-pixel circuit according to embodiments.

FIG. 3 is a flow a flow diagram of an on-demand method for forming asub-pixel circuit according to embodiments.

FIGS. 4A-4O are schematic, cross-sectional views of a substrate during amethod for forming a sub-pixel circuit according embodiments.

FIGS. 4P-4W are schematic, cross-sectional views of a substrate during amethod for forming a sub-pixel circuit according embodiments.

FIG. 5 is a flow a flow diagram of an on-demand half-tone lithographymethod for forming a sub-pixel circuit according to embodiments.

FIG. 6 is a flow a flow diagram of a one-step method for forming asub-pixel circuit according to embodiments.

FIGS. 7A-7L are schematic, cross-sectional views of a substrate during amethod for forming a sub-pixel circuit according embodiments describedherein.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements disclosed in oneembodiment may be beneficially utilized on other embodiments withoutspecific recitation.

DETAILED DESCRIPTION

Embodiments described herein generally relate to a display. Morespecifically, embodiments described herein relate to sub-pixel circuitsand methods of forming sub-pixel circuits that may be utilized in adisplay such as an organic light-emitting diode (OLED) display. In oneembodiment, which can be combined with other embodiments describedherein, the display is a bottom emission (BE) or a top emission (TE)OLED display. In another embodiment, which can be combined with otherembodiments described herein, the display is a passive-matrix (PM) or anactive matrix (AM) OLED display.

A first exemplary embodiment of the embodiments described hereinincludes a sub-pixel circuit having a dot-type architecture. A secondexemplary embodiment of the embodiments described herein includes asub-pixel circuit having a line-type architecture. A third exemplaryembodiment of the embodiments described herein includes a sub-pixelcircuit having a dot-type architecture with a plug disposed on anencapsulation layer of a respective sub-pixel. A fourth exemplaryembodiment of the embodiments described herein includes a sub-pixelcircuit having a line-type architecture with a plug disposed on anencapsulation layer of a respective sub-pixel. A fifth exemplaryembodiment of the embodiments described herein includes an on-demandmethod to fabricate a sub-pixel circuit of one of the first, second,third, or fourth exemplary embodiments. A sixth exemplary embodiment ofthe embodiments described herein includes an on-demand half-tonelithography method to fabricate a sub-pixel circuit of one of the firstand second exemplary embodiments. A seventh exemplary embodiment of theembodiments described herein includes a one-step method to fabricate asub-pixel circuit of one of the first, second, third, or fourthexemplary embodiments.

Each of the embodiments (including the first-seventh exemplaryembodiments) described herein of the sub-pixel circuit include aplurality of sub-pixels with each of the sub-pixels defined by adjacentinorganic overhang structures that are permanent to the sub-pixelcircuit. While the Figures depict two sub-pixels with each sub-pixeldefined by adjacent inorganic overhang structures, the sub-pixel circuitof the embodiments described herein include a plurality of sub-pixels,such as two or more sub-pixels. Each sub-pixel has the OLED materialconfigured to emit a white, red, green, blue or other color light whenenergized. E.g., the OLED material of a first sub-pixel emits a redlight when energized, the OLED material of a second sub-pixel emits agreen light when energized, and the OLED material of a third sub-pixelemits a blue light when energized.

The inorganic overhang structures are permanent to the sub-pixel circuitand include at least an upper portion disposed on a lower portion. Afirst configuration of the inorganic overhang structures includes theupper portion of a non-conductive inorganic material and the lowerportion of a conductive inorganic material. A second configuration ofthe inorganic overhang structures includes the upper portion of aconductive inorganic material and the lower portion of a conductiveinorganic material. A third configuration of the inorganic overhangstructures includes the upper portion of a non-conductive inorganicmaterial, the lower portion of a non-conductive inorganic material, andan assistant cathode disposed under the lower portion. A fourthconfiguration of the inorganic overhang structures includes the upperportion of a conductive inorganic material, the lower portion of anon-conductive inorganic material, and an assistant cathode disposedunder the lower portion. Any of the first, second, third, and fourthexemplary embodiments include inorganic overhang structures of at leastone of the first, second, third, or fourth configurations.

The adjacent inorganic overhang structures defining each sub-pixel ofthe sub-pixel circuit of the display provide for formation of thesub-pixel circuit using evaporation deposition and provide for theinorganic overhang structures to remain in place after the sub-pixelcircuit is formed (e.g., utilizing the methods of the fifth, sixth, orseventh exemplary embodiments). Evaporation deposition may be utilizedfor deposition of an OLED material (including a hole injection layer(HIL), a hole transport layer (HTL), an emissive layer (EML), and anelectron transport layer (ETL)) and cathode. One or more of anencapsulation layer, the plug, and a global passivation layer may bedisposed via evaporation deposition. In embodiments including one ormore capping layers, the capping layers are disposed between the cathodeand the encapsulation layer. The inorganic overhang structures definedeposition angles, i.e., provide for a shadowing effect duringevaporation deposition, for each of the OLED material and the cathodesuch the OLED material does not contact the lower portion (and assistantcathode according to embodiments with the third and fourthconfigurations) and the cathode contacts the lower portion according tothe first and second configurations or at least the assistant cathode ofthe third and fourth configurations. The encapsulation layer of arespective sub-pixel is disposed over the cathode with the encapsulationlayer extending under at least a portion of each of the adjacentinorganic overhang structures and along a sidewall of each of theadjacent inorganic overhang structures.

FIG. 1A is a schematic, cross-sectional view of a sub-pixel circuit 100having a plugless arrangement 101A. The plugless arrangement 101A maycorrespond to the first or second exemplary embodiments of the sub-pixelcircuit 100. FIG. 1B is a schematic, cross-sectional view of a sub-pixelcircuit 100 having a plug arrangement 101B. The plug arrangement 101Bmay correspond to the third or fourth exemplary embodiments of thesub-pixel circuit 100. Each of the cross-sectional views of FIGS. 1A and1B are taken along section line 1″-1″ of FIGS. 1C and 1D.

The sub-pixel circuit 100 includes a substrate 102. Metal layers 104 maybe patterned on the substrate 102 and are defined by adjacentpixel-defining layer (PDL) structures 126 disposed on the substrate 102.In one embodiment, which can be combined other embodiments describedherein, the metal layers 104 are pre-patterned on the substrate 102.E.g., the substrate 102 is a pre-patterned indium tin oxide (ITO) glasssubstrate. The metal layers 104 are configured to operate anodes ofrespective sub-pixels. The metal layers 104 include, but are not limitedto, chromium, titanium, gold, silver, copper, aluminum, ITO, acombination thereof, or other suitably conductive materials.

The PDL structures 126 are disposed on the substrate 102. The PDLstructures 126 include one of an organic material, an organic materialwith an inorganic coating disposed thereover, or an inorganic material.The organic material of the PDL structures 126 includes, but is notlimited to, polyimides. The inorganic material of the PDL structures 126includes, but is not limited to, silicon oxide (SiO₂), silicon nitride(Si₃N₄), silicon oxynitride (Si₂N₂O), magnesium fluoride (MgF₂), orcombinations thereof. Adjacent PDL structures 126 define a respectivesub-pixel and expose the anode (i.e., metal layer 104) of the respectivesub-pixel of the sub-pixel circuit 100.

The sub-pixel circuit 100 has a plurality of sub-pixels 106 including atleast a first sub-pixel 108 a and a second sub-pixel 108 b. While theFigures depict the first sub-pixel 108 a and the second sub-pixel 108 b.The sub-pixel circuit 100 of the embodiments described herein mayinclude two or more sub-pixels 106, such as a third and a fourthsub-pixel. Each sub-pixel 106 has an OLED material 112 configured toemit a white, red, green, blue or other color light when energized.E.g., the OLED material 112 of the first sub-pixel 108 a emits a redlight when energized, the OLED material of the second sub-pixel 108 bemits a green light when energized, the OLED material of a thirdsub-pixel emits a blue light when energized, and the OLED material of afourth sub-pixel emits a other color light when energized

Inorganic overhang structures 110 are disposed on an upper surface 103of each of the PDL structures 126. The inorganic overhang structures 110are permanent to the sub-pixel circuit. The inorganic overhangstructures 110 further define each sub-pixel 106 of the sub-pixelcircuit 100. The inorganic overhang structures 110 include at least anupper portion 1106 disposed on a lower portion 110A. A firstconfiguration of the inorganic overhang structures 110 includes theupper portion 1106 of a non-conductive inorganic material and the lowerportion 110A of a conductive inorganic material. A second configurationof the inorganic overhang structures 110 includes the upper portion 1106of a conductive inorganic material and the lower portion 110A of aconductive inorganic material. A third configuration of the inorganicoverhang structures 110 includes the upper portion 1106 of anon-conductive inorganic material, the lower portion 110A of anon-conductive inorganic material, and an assistant cathode 202 (shownin FIG. 2) disposed under the lower portion 110A. A fourth configurationof the inorganic overhang structures 110 includes the upper portion 1106of a conductive inorganic material, the lower portion 110A of anon-conductive inorganic material, and an assistant cathode 202 disposedunder the lower portion 110A. The first, second, third, and fourthexemplary embodiments of the sub-pixel circuit 100 include inorganicoverhang structures 110 of at least one of the first, second, third, orfourth configurations. The inorganic overhang structures 110 are able toremain in place, i.e., are permanent. Thus, organic material from liftedoff overhang structures that disrupt OLED performance would not be leftbehind. Eliminating the need for a lift-off procedure also increasesthroughput.

The non-conductive inorganic material includes, but it not limited to,an inorganic silicon-containing material. E.g., the silicon-containingmaterial includes oxides or nitrides of silicon, or combinationsthereof. The conductive inorganic material includes, but it not limitedto, a metal-containing material. E.g., the metal-containing materialincludes copper, titanium, aluminum, molybdenum, silver, indium tinoxide, indium zinc oxide, or combinations thereof.

At least a bottom surface 107 of the upper portion 1106 is wider than atop surface 105 of the lower portion 110A to form an overhang 109. Thebottom surface 107 larger than the top surface 105 forming the overhang109 allows for the upper portion 1106 to shadow the lower portion 110A.The shadowing of the overhang 109 provides for evaporation depositioneach of the OLED material 112 and a cathode 114. As further discussed inthe corresponding description of FIG. 2, the shadowing effect of theinorganic overhang structures 110 define a OLED angle θ_(OLED) (shown inFIG. 2) of the OLED material 112 and a cathode angle θ_(cathode) (shownin FIG. 2) of the cathode 114. The OLED angle θ_(OLED) of the OLEDmaterial 112 and the cathode angle θ_(cathode) of the cathode 114 mayresult from evaporation deposition of the OLED material 112 and thecathode 114. In the first and second configurations, the OLED material112 does not contact and the cathode 114 contacts the lower portion 110Aof the inorganic overhang structures 110. In the third and fourthconfigurations, the OLED material 112 does not contact the lower portion110A and the assistant cathode 202, and the cathode 114 contacts atleast the assistant cathode 202. In another configurations, the lowerportion 110A is non-conductive and the assistant cathode 202 is notincluded. In this configuration the cathode 114 contacts busbars (notshown) outside of an active area of the sub-pixel circuit 100.

The OLED material 112 may include one or more of a HIL, a HTL, an EML,and an ETL. The OLED material 112 is disposed on the metal layer 104. Insome embodiments, which can be combined with other embodiments describedherein, the OLED material 112 is disposed on the metal layer 104 andover a portion of the PDL structures 126. The cathode 114 is disposedover the OLED material 112 of the PDL structures 126 in each sub-pixel106. The cathode 114 may be disposed on a portion of a sidewall 111 ofthe lower portion 110A. The cathode 114 and the assistant cathode 202include a conductive material, such as a metal. E.g., the cathode 114and/or the assistant cathode 202 include, but are not limited to,chromium, titanium, aluminum, ITO, or a combination thereof. In someembodiments, which can be combined with other embodiments describedherein, the OLED material 112 and the cathode 114 are disposed over asidewall 113 of the upper portion 1106 of the inorganic overhangstructures 110. In other embodiments, which can be combined with otherembodiments described herein, the OLED material 112 and the cathode 114are disposed over a top surface 115 of the upper portion 1106 of theinorganic overhang structures 110.

Each sub-pixel 106 includes include an encapsulation layer 116. Theencapsulation layer 116 may be or may correspond to a local passivationlayer. The encapsulation layer 116 of a respective sub-pixel is disposedover the cathode 114 (and OLED material 112) with the encapsulationlayer 116 extending under at least a portion of each of the inorganicoverhang structures 110 and along a sidewall of each of the inorganicoverhang structures 110. The encapsulation layer 116 is disposed overthe cathode 114 and over at least the sidewall 111 of the lower portion110A. In some embodiments, which can be combined with other embodimentsdescribed herein, the encapsulation layer 116 is disposed over thesidewall 113 of the upper portion 1106. In some embodiments, which canbe combined with other embodiments described herein, the encapsulationlayer 116 is disposed over the top surface 115 of the upper portion 1106of the inorganic overhang structures 110. The encapsulation layer 116includes the non-conductive inorganic material, such as thesilicon-containing material. The silicon-containing material may includeSi₃N₄ containing materials.

In embodiments including one or more capping layers, the capping layersare disposed between the cathode 114 and the encapsulation layer 116.E.g., as shown in FIG. 1A, a first capping layer 121 and a secondcapping layer 123 are disposed between the cathode 114 and theencapsulation layer 116. While FIG. 1A depicts the sub-pixel circuit 100having one or more capping layers, each of the embodiments describedherein may include one or more capping layers disposed between thecathode 114 and the encapsulation layer 116. The first capping layer 121may include an organic material. The second capping layer 123 mayinclude an inorganic material, such as lithium fluoride. The firstcapping layer 121 and the second capping layer 123 may be deposited byevaporation deposition.

The plugless arrangement 101A and the plug arrangement 101B of thesub-pixel circuit 100 further include at least a global passivationlayer 120 disposed over the inorganic overhang structures 110 and theencapsulation layers 116. An inkjet layer 118 may be disposed betweenthe global passivation layer 120 and the inorganic overhang structures110 and the encapsulation layers 116. The inkjet layer 118 may includean acrylic material. The plug arrangement 101B (including the third andfourth exemplary embodiments) may include an intermediate passivationlayer disposed over the inorganic overhang structures 110 and plugs 122of each of the sub-pixels 106, and disposed between the inkjet layer 118and the global passivation layer 120.

The plug arrangement 101B, including the third and fourth exemplaryembodiments, includes plugs 122 disposed over the encapsulation layers116. Each plug 122 is disposed in a respective sub-pixel 106 of thesub-pixel circuit 100. The plugs 122 may be disposed over the topsurface 115 of the upper portion 110B of the inorganic overhangstructures 110. The plugs 122 may have an additional passivation layerdisposed thereon (as shown in FIG. 4Q). The plugs 122 include, but arenot limited to, a photoresist, a color filter, or a photosensitivemonomer. The plugs 122 have a plug transmittance that is matched orsubstantially matched to an OLED transmittance of the OLED material 112.The plugs 122 may each be the same material and match the OLEDtransmittance. The plugs 122 may be different materials that match theOLED transmittance of each respective sub-pixel of the plurality ofsub-pixels 106. The matched or substantially matched resisttransmittance and OLED transmittance allow for the plugs 122 to remainover the sub-pixels 106 without blocking the emitted light from the OLEDmaterial 112. The plugs 122 are able to remain in place and thus do notrequire a lift off procedure to be removed from the sub-pixel circuit100. Additional pattern resist materials disposed over the formedsub-pixels 106 at subsequent operations are not required because theplugs 122 remain. Eliminating the need for a lift-off procedure on theplugs 122 and the need for additional pattern resist materials on thesub-pixel circuit 100 increases throughput.

FIG. 1C is a schematic, top sectional view of a sub-pixel circuit 100having a dot-type architecture 101C. The dot-type architecture 101C maycorrespond to the first or third exemplary embodiments of the sub-pixelcircuit 100. FIG. 1D is a schematic, cross-sectional view of a sub-pixelcircuit 100 having a line-type architecture 101D. The line-typearchitecture 101D may correspond to the second or fourth exemplaryembodiments of the sub-pixel circuit 100. Each of the top sectionalviews of FIGS. 1C and 1D are taken along section line 1′-1′ of FIGS. 1Aand 1B.

The dot-type architecture 101C includes a plurality of pixel openings124A. Each of pixel opening 124A is surrounded by inorganic overhangstructures 110 that define each of the sub-pixels 106 of the dot-typearchitecture 101C. The line-type architecture 101D includes a pluralityof pixel openings 124B. Each of pixel opening 124B is abutted byinorganic overhang structures 110 that define each of the sub-pixels 106of the line-type architecture 101D. Each of an on-demand method 300, anon-demand half-tone lithography method 500, and an one-step method 600of fabricating a sub-pixel circuit 100 described herein provide for theability to fabricate both the sub-pixel circuit 100 with the dot-typearchitecture 101C and the sub-pixel circuit 100 with the line-typearchitecture 101D.

FIG. 2 is a schematic, cross-sectional view of an inorganic overhangstructure 110 of a sub-pixel circuit 100. While FIG. 2 depicts the thirdand fourth configurations of the inorganic overhang structures 110, thedescription herein is applicable to the first configuration of theinorganic overhang structures 110 including the upper portion 110B of anon-conductive inorganic material and the lower portion 110A of aconductive inorganic material, and the second configuration of theinorganic overhang structures 110 including the upper portion 1106 of aconductive inorganic material and the lower portion 110A of a conductiveinorganic material. In the first and second configurations, the OLEDmaterial 112 does not contact and the cathode 114 contacts the lowerportion 110A of the inorganic overhang structures 110. In the third andfourth configurations, the OLED material 112 does not contact the lowerportion 110A and the assistant cathode 202, and the cathode 114 contactsat least the assistant cathode 202.

The upper portion 1106 includes an underside edge 206 and an overhangvector 208. The underside edge 206 extends past the sidewall 111 of thelower portion 110A. The overhang vector 208 is defined by the undersideedge 206 and the PDL structure 126. The OLED material 112 is disposedover the anode and over a shadow portion 210 of the PDL structure 126.The OLED material 112 forms an OLED angle θ_(OLED) between an OLEDvector 212 and the overhang vector 208. The OLED vector 212 is definedby an OLED edge 214 extending under the upper portion 1106 and theunderside edge 206 of the upper portion 1106. In one embodiment, whichcan be combined with other embodiments described herein, a HIL 204 ofthe OLED material 112 included. In the embodiment including the HIL 204,the OLED material 112 includes the HTL, the EML, and the ETL. The HIL204 forms an HIL angle θ_(HIL) between a HIL vector 216 and the overhangvector 208. The HIL vector 216 is defined by an HIL edge 218 extendingunder the upper portion 1106 and the underside edge 206 of the upperportion 1106.

The cathode 114 is disposed over the OLED material 112 and over theshadow portion 210 of the PDL structure 126. In some embodiments, whichcan be combined with other embodiments described herein, the cathode 114is disposed on a portion 220 of the sidewall 111 of the lower portion110A. In other embodiments, which can be combined with other embodimentsdescribed herein, the cathode 114 contacts a portion 222 of theassistant cathode 202 on the shadow portion 210 of the PDL 126. In theembodiments with the cathode 114 contacting the portion 222 of theassistant cathode 202, the cathode 114 may also contact the portion 220of the sidewall 111 of the lower portion 110A. The cathode 114 forms acathode angle θ_(cathode) between a cathode vector 224 and the overhangvector 208. The cathode vector 224 is defined by a cathode edge 226 atleast extending under the upper portion 1106 and the underside edge 206of the upper portion 1106. The encapsulation layer 116 is disposed overthe cathode 114 (and OLED material 112) with the encapsulation layer 116extending at least under the upper portion 1106 of the inorganicoverhang structure 110 and along the sidewall 111 of the lower portion110A.

During evaporation deposition of the OLED material 112, the undersideedge 206 of the upper portion 1106 defines the position of the OLED edge214. E.g., the OLED material 112 is evaporated at an OLED maximum anglethat corresponds to the OLED vector 212 and the underside edge 206ensures that the OLED material 112 is not deposited past the OLED edge214. In embodiments with the HIL 204, the underside edge 206 of theupper portion 1106 defines the position of the HIL edge 218. E.g., theHIL 204 is evaporated at an HIL maximum angle that corresponds to theHIL vector 216 and the underside edge 206 ensures that HIL 204 is notdeposited past the HIL edge 218. During evaporation deposition of thecathode 114, the underside edge 206 of the upper portion 1106 definesthe position of the cathode edge 226. E.g., the cathode 114 isevaporated at a cathode maximum angle that corresponds to the cathodevector 224 and the underside edge 206 ensures that the cathode 114 isnot deposited past the cathode edge 226. The OLED angle θ_(OLED) is lessthan the cathode angle θ_(cathode). The HIL angle θ_(HIL) is less thanthe OLED angle θ_(OLED).

FIG. 3 is a flow a flow diagram of an on-demand method 300 for forming asub-pixel circuit 100. The on-demand method 300 corresponds to theon-demand method to fabricate a sub-pixel circuit 100 of one of thefirst, second, third, or fourth exemplary embodiments. FIGS. 4A-4O areschematic, cross-sectional views of a substrate 102 during the method300 for forming the sub-pixel circuit 100 according embodimentsdescribed herein. FIGS. 4A-4F, 4H, 4J, 4L, and 4N correspond to theplugless arrangement 101A of the first or second exemplary embodimentsof the sub-pixel circuit 100. FIGS. 4A-4E, 4G, 4I, 4K, 4M, and 4Ocorrespond to the plug arrangement 101B of the third or fourth exemplaryembodiments of the sub-pixel circuit 100.

At operation 301, as shown in FIG. 4A, a lower portion layer 402A and anupper portion layer 402B are deposited over the substrate 102. The lowerportion layer 402A is disposed over the PDL structures 126 and the metallayers 104. The upper portion layer 402B is disposed over the lowerportion layer 402A. The lower portion layer 402A corresponds to thelower portion 110A and the upper portion layer 402B corresponds to theupper portion 110B of the inorganic overhang structures 110. Inembodiments including the third and fourth configurations of theinorganic overhang structures 110, an assistant cathode layer 404 isdisposed between the lower portion layer 402A and the PDL structures 126and the metal layers 104.

At operation 302, as shown in FIG. 4B, a resist 406 is disposed andpatterned. The resist 406 is disposed over the upper portion layer 402B.The resist 406 is a positive resist or a negative resist. A positiveresist includes portions of the resist, which, when exposed toelectromagnetic radiation, are respectively soluble to a resistdeveloper applied to the resist after the pattern is written into theresist using the electromagnetic radiation. A negative resist includesportions of the resist, which, when exposed to radiation, will berespectively insoluble to the resist developer applied to the resistafter the pattern is written into the resist using the electromagneticradiation. The chemical composition of the resist 406 determines whetherthe resist is a positive resist or a negative resist. The resist 406 ispatterned to form one of a pixel opening 124A of the dot-typearchitecture 101C or a pixel opening 124B of the line-type architecture101D of a first sub-pixel 108 a. The patterning is one of aphotolithography, digital lithography process, or laser ablationprocess.

At operation 303, as shown in FIG. 4C, portions of the upper portionlayer 402B and the lower portion layer 402A exposed by the pixel opening124A, 124B are removed. The upper portion layer 402B exposed by thepixel opening 124A, 124B may be removed a dry etch process. The lowerportion layer 402A exposed by the pixel opening 124A, 124B may beremoved by a wet etch process. In embodiments including the assistantcathode layer 404, a portion of the assistant cathode layer 404 may beremoved by a dry etch process or a wet etch process to form theassistant cathode 202 disposed under the lower portion 110A. Operation303 forms the inorganic overhang structures 110 of the first sub-pixel108 a. The etch selectivity of the between the materials of the upperportion layer 402B corresponding to the upper portion 110B and the lowerportion layer 402A corresponding to the lower portion 110A and the etchprocesses to remove the exposed portions of the upper portion layer 402Band the lower portion layer 402A provide for the bottom surface 107 ofthe upper portion 110B being wider than the top surface 105 of the lowerportion 110A to form the overhang 109 (as shown in FIGS. 1A, 1B, and 2).The shadowing of the overhang 109 provides for evaporation depositionthe OLED material 112 and the cathode 114.

At operation 304, as shown in FIG. 4D, the OLED material 112 of thefirst sub-pixel 108 a, the cathode 114, and the encapsulation layer 116are deposited. The shadowing of the overhang 109 provides forevaporation deposition each of the OLED material 112 and a cathode 114.As further discussed in the corresponding description of FIG. 2, theshadowing effect of the inorganic overhang structures 110 define theOLED angle θ_(OLED) (shown in FIG. 2) of the OLED material 112 and thecathode angle θ_(cathode) (shown in FIG. 2) of the cathode 114. The OLEDangle θ_(OLED) of the OLED material 112 and the cathode angleθ_(cathode) of the cathode 114 result from evaporation deposition of theOLED material 112 and the cathode 114. In the first and secondconfigurations, the OLED material 112 does not contact and the cathode114 contacts the lower portion 110A of the inorganic overhang structures110. In the third and fourth configurations, the OLED material 112 doesnot contact the lower portion 110A and the assistant cathode 202, andthe cathode 114 contacts at least the assistant cathode 202. Theencapsulation layer 116 is deposited over the cathode 114. Inembodiments including capping layers, the capping layers are depositedbetween the cathode 114 and the encapsulation layer 116. The cappinglayers may be deposited by evaporation deposition.

At operation 305, as shown in FIG. 4E, a resist 408 is formed in a well410 of the first sub-pixel 108 a. At operation 306, as shown in FIGS. 4Fand 4G, the encapsulation layer 116, the cathode 114, and the OLEDmaterial 112 exposed by the resist 408 are removed. The encapsulationlayer 116, the cathode 114, and the OLED material 112 exposed by resist408 may be removed by wet etch processes. According to embodiments withthe plugless arrangement 101A of the sub-pixel circuit 100, the resist408 is removed, as shown in FIG. 4F. According to embodiments with theplug arrangement 101B of the sub-pixel circuit 100, the resist 408 iscorresponds to the plug 122 of the first sub-pixel 108 a, as shown inFIG. 4G. At operation 307, as shown in FIGS. 4H and 4I, a resist 412 isdisposed and patterned. The resist 412 is disposed over the upperportion layer 402B and the upper portion 110B of the first sub-pixel 108a. In embodiments with the plug arrangement 101B, as shown in FIG. 4I, apassivation layer 414 is disposed at least the plug 122 of the firstsub-pixel 108 a. The passivation layer 414 of the plug arrangement 101Bmay be disposed over the upper portion layer 402B and the upper portion110B of the first sub-pixel 108 a. The resist 412 is patterned to formone of the pixel opening 124A of the dot-type architecture 101C or thepixel opening 124B of the line-type architecture 101D of a secondsub-pixel 108 b.

At operation 308, portions of the upper portion layer 402B and the lowerportion layer 402A exposed by the pixel opening 124A, 124B of the secondsub-pixel 108 b are removed. The upper portion layer 402B exposed by thepixel opening 124A, 124B may be removed a dry etch process. The lowerportion layer 402A exposed by the pixel opening 124A, 124B may beremoved by a wet etch process. In embodiments including the assistantcathode layer 404, a portion of the assistant cathode layer 404 may beremoved by a dry etch process or a wet etch process to form theassistant cathode 202 disposed under the lower portion 110A. Operation308 forms the inorganic overhang structures 110 of the second sub-pixel108 b. The etch selectivity of the between the materials of the upperportion layer 402B corresponding to the upper portion 110B and the lowerportion layer 402A corresponding to the lower portion 110A and the etchprocesses to remove the exposed portions of the upper portion layer 402Band the lower portion layer 402A provide for the bottom surface 107 ofthe upper portion 110B being wider than the top surface 105 of the lowerportion 110A to form the overhang 109 (as shown in FIGS. 1A, 1B, and 2).The shadowing of the overhang 109 provides for evaporation depositionthe OLED material 112 and the cathode 114.

At operation 309, as shown in FIGS. 4J and 4K, the OLED material 112 ofthe second sub-pixel 108 b, the cathode 114, and the encapsulation layer116 are deposited. In embodiments including capping layers, the cappinglayers are deposited between the cathode 114 and the encapsulation layer116. The capping layers may be deposited by evaporation deposition. Theshadowing of the overhang 109 provides for evaporation deposition eachof the OLED material 112 and a cathode 114. As further discussed in thecorresponding description of FIG. 2, the shadowing effect of theinorganic overhang structures 110 define the OLED angle θ_(OLED) (shownin FIG. 2) of the OLED material 112 and the cathode angle θ_(cathode)(shown in FIG. 2) of the cathode 114. The OLED angle θ_(OLED) of theOLED material 112 and the cathode angle θ_(cathode) of the cathode 114result from evaporation deposition of the OLED material 112 and thecathode 114. In the first and second configurations, the OLED material112 does not contact and the cathode 114 contacts the lower portion 110Aof the inorganic overhang structures 110. In the third and fourthconfigurations, the OLED material 112 does not contact the lower portion110A and the assistant cathode 202, and the cathode 114 contacts atleast the assistant cathode 202. The encapsulation layer 116 isdeposited over the cathode 114.

At operation 310, as shown in FIGS. 4L and 4M, a resist 416 is formed ina well 418 of the second sub-pixel 108 b. At operation 311, as shown inFIGS. 4N and 4O, the encapsulation layer 116, the cathode 114, and theOLED material 112 exposed by the resist 416 are removed. Theencapsulation layer 116, the cathode 114, and the OLED material 112exposed by resist 416 may be removed by wet etch processes. According toembodiments with the plugless arrangement 101A of the sub-pixel circuit100, the resist 416 is removed, as shown in FIG. 4F. According toembodiments with the plug arrangement 101B of the sub-pixel circuit 100,the resist 416 is corresponds to the plug 122 of the second sub-pixel108 b, as shown in FIGS. 4G and 4O. Operations 301-311 described hereinform the sub-pixel circuit 100 including two sub-pixels 106. Operations306-310 may be repeated for each addition sub-pixel, e.g. for a thirdand/or a fourth sub-pixel.

FIG. 5 is a flow a flow diagram of an on-demand half-tone lithographymethod 500 for forming a sub-pixel circuit 100. The on-demand half-tonelithography method 500 corresponds to the on-demand half-tonelithography method to fabricate a sub-pixel circuit 100 of one of thefirst and second exemplary embodiments. FIGS. 4A-4D and 4P-4W areschematic, cross-sectional views of a substrate 102 during the method500 for forming the sub-pixel circuit 100 according embodimentsdescribed herein.

At operation 501, as shown in FIG. 4A, a lower portion layer 402A and anupper portion layer 402B are deposited over the substrate 102. The lowerportion layer 402A is disposed over the PDL structures 126 and the metallayers 104. The upper portion layer 402B is disposed over the lowerportion layer 402A. The lower portion layer 402A corresponds to thelower portion 110A and the upper portion layer 402B corresponds to theupper portion 110B of the inorganic overhang structures 110. Inembodiments including the third and fourth configurations of theinorganic overhang structures 110, an assistant cathode layer 404 isdisposed between the lower portion layer 402A and the PDL structures 126and the metal layers 104.

At operation 502, as shown in FIG. 4B, a resist 406 is disposed andpatterned. The resist 406 is disposed over the upper portion layer 402B.The resist 406 is a positive resist or a negative resist. A positiveresist includes portions of the resist, which, when exposed toelectromagnetic radiation, are respectively soluble to a resistdeveloper applied to the resist after the pattern is written into theresist using the electromagnetic radiation. A negative resist includesportions of the resist, which, when exposed to radiation, will berespectively insoluble to the resist developer applied to the resistafter the pattern is written into the resist using the electromagneticradiation. The chemical composition of the resist 406 determines whetherthe resist is a positive resist or a negative resist. The resist 406 ispatterned to form one of a pixel opening 124A of the dot-typearchitecture 101C or a pixel opening 124B of the line-type architecture101D of a first sub-pixel 108 a. The patterning is one of aphotolithography, digital lithography process, or laser ablationprocess.

At operation 503, as shown in FIG. 4C, portions of the upper portionlayer 402B and the lower portion layer 402A exposed by the pixel opening124A, 124B are removed. The upper portion layer 402B exposed by thepixel opening 124A, 124B may be removed a dry etch process. The lowerportion layer 402A exposed by the pixel opening 124A, 124B may beremoved by a wet etch process. In embodiments including the assistantcathode layer 404, a portion of the assistant cathode layer 404 may beremoved by a dry etch process or a wet etch process to form theassistant cathode 202 disposed under the lower portion 110A. Operation503 forms the inorganic overhang structures 110 of the first sub-pixel108 a. The etch selectivity of the between the materials of the upperportion layer 402B corresponding to the upper portion 110B and the lowerportion layer 402A corresponding to the lower portion 110A and the etchprocesses to remove the exposed portions of the upper portion layer 402Band the lower portion layer 402A provide for the bottom surface 107 ofthe upper portion 110B being wider than the top surface 105 of the lowerportion 110A to form the overhang 109 (as shown in FIGS. 1A, 1B, and 2).The shadowing of the overhang 109 provides for evaporation depositionthe OLED material 112 and the cathode 114.

At operation 504, as shown in FIG. 4D, the OLED material 112 of thefirst sub-pixel 108 a, the cathode 114, and the encapsulation layer 116are deposited. In embodiments including capping layers, the cappinglayers are deposited between the cathode 114 and the encapsulation layer116. The capping layers may be deposited by evaporation deposition. Theshadowing of the overhang 109 provides for evaporation deposition eachof the OLED material 112 and a cathode 114. As further discussed in thecorresponding description of FIG. 2, the shadowing effect of theinorganic overhang structures 110 define the OLED angle θ_(OLED) (shownin FIG. 2) of the OLED material 112 and the cathode angle θ_(cathode)(shown in FIG. 2) of the cathode 114. The OLED angle θ_(OLED) of theOLED material 112 and the cathode angle θ_(cathode) of the cathode 114result from evaporation deposition of the OLED material 112 and thecathode 114. In the first and second configurations, the OLED material112 does not contact and the cathode 114 contacts the lower portion 110Aof the inorganic overhang structures 110. In the third and fourthconfigurations, the OLED material 112 does not contact the lower portion110A and the assistant cathode 202, and the cathode 114 contacts atleast the assistant cathode 202. The encapsulation layer 116 isdeposited over the cathode 114.

At operation 505, as shown in FIG. 4P, a resist 420 is deposed andhalf-tone patterned. Half-tone patterning the resist 420 includes adigital lithography process that patterns the resist to form two or moreportions with each of the portions having different depths. Each portioncorresponds to a respective sub-pixel. As shown in FIG. 4P, thehalf-tone patterning of the resist 420 forms a first portion 422 overthe first sub-pixel 108 a and a second portion 424 over the secondsub-pixel 108 b to be formed. The second portion 424 exposes portions ofthe pixel opening 124A, 124B of the second sub-pixel 108 b. At operation506, as shown in FIG. 4Q, the encapsulation layer 116, the cathode 114,the OLED material 112, the upper portion layer 402B, and the lowerportion layer 402A exposed by the pixel opening 124A, 124B are removed.Operation 506 forms the inorganic overhang structures 110 of the secondsub-pixel 108 b. The etch selectivity of the between the materials ofthe upper portion layer 402B corresponding to the upper portion 110B andthe lower portion layer 402A corresponding to the lower portion 110A andthe etch processes to remove the exposed portions of the upper portionlayer 402B and the lower portion layer 402A provide for the bottomsurface 107 of the upper portion 110B being wider than the top surface105 of the lower portion 110A to form the overhang 109 (as shown inFIGS. 1A, 1B, and 2). The shadowing of the overhang 109 provides forevaporation deposition the OLED material 112 and the cathode 114.

At operation 507, as shown in FIG. 4R, the resist 420 is removed. Atoperation 508, as shown in FIG. 4S, the OLED material 112 of the secondsub-pixel 108 b, the cathode 114, and the encapsulation layer 116 aredeposited. In embodiments including capping layers, the capping layersare deposited between the cathode 114 and the encapsulation layer 116.The capping layers may be deposited by evaporation deposition. Theshadowing of the overhang 109 provides for evaporation deposition eachof the OLED material 112 and a cathode 114. As further discussed in thecorresponding description of FIG. 2, the shadowing effect of theinorganic overhang structures 110 define the OLED angle θ_(OLED) (shownin FIG. 2) of the OLED material 112 and the cathode angle θ_(cathode)(shown in FIG. 2) of the cathode 114. The OLED angle θ_(OLED) of theOLED material 112 and the cathode angle θ_(cathode) of the cathode 114result from evaporation deposition of the OLED material 112 and thecathode 114. In the first and second configurations, the OLED material112 does not contact and the cathode 114 contacts the lower portion 110Aof the inorganic overhang structures 110. In the third and fourthconfigurations, the OLED material 112 does not contact the lower portion110A and the assistant cathode 202, and the cathode 114 contacts atleast the assistant cathode 202. The encapsulation layer 116 isdeposited over the cathode 114.

At operation 509, as shown in FIG. 4T, a resist 426 is deposed andhalf-tone patterned. Half-tone patterning the resist 426 includes adigital lithography process that patterns the resist to form two or moreportions with each of the portions having different depths. Each portioncorresponds to a respective sub-pixel. As shown in FIG. 4U, thehalf-tone patterning of the resist 426 forms a first portion 422 overthe first sub-pixel 108 a and a second portion 424 over the secondsub-pixel 108 b. At operation 510, as shown in FIG. 4V, the firstportion 422 of the resist 426 is plasma ashed. At operation 511, asshown in FIG. 4W, the encapsulation layer 116, the cathode 114, and theOLED material 112 of the second sub-pixel 108 b exposed by the resist426 are removed. At operation 512, as shown in FIG. 4Y, the resist 426is removed. Operations 501-512 described herein form the sub-pixelcircuit 100 including two sub-pixels 106. Operations 505-512 may berepeated for each addition sub-pixel, e.g. for a third and/or a fourthsub-pixel.

FIG. 6 is a flow a flow diagram of a one-step method 600 for forming asub-pixel circuit 100. The one-step method 600 corresponds to theone-step method to fabricate a sub-pixel circuit 100 of one of thefirst, second, third, or fourth exemplary embodiments. FIGS. 7A-7L areschematic, cross-sectional views of a substrate 102 during the method600 for forming the sub-pixel circuit 100 according embodimentsdescribed herein. FIGS. 7A-7C, 7E, 7G, 7I, and 7K correspond to theplugless arrangement 101A of the first or second exemplary embodimentsof the sub-pixel circuit 100. FIGS. 7A, 7B, 7D, 7F, 7H, 7J, and 7Lcorrespond to the plug arrangement 101B of the third or fourth exemplaryembodiments of the sub-pixel circuit 100.

At operation 601, as shown in FIG. 7A, the inorganic overhang structures110 are formed. Forming the inorganic overhang structures 110 includes alower portion layer and an upper portion layer are deposited over thesubstrate 102. The first lower portion is disposed over the PDLstructures 126 and the metal layers 104. The upper portion layer isdisposed over the lower portion layer. The lower portion layercorresponds to the lower portion 110A and the upper portion layercorresponds to the upper portion 110B of the inorganic overhangstructures 110. In embodiments including the third and fourthconfigurations of the inorganic overhang structures 110, an assistantcathode layer is disposed between the lower portion layer 402A and thePDL structures 126 and the metal layers 104. The assistant cathode layercorresponds to the assistant cathode 202. A resist is disposed andpatterning over the upper portion layer. To form the inorganic overhangstructures 110 portions of the upper portion layer 402B and the lowerportion layer 402A exposed by the pixel opening 124A, 124B are removed.

At operation 602, as shown in FIG. 7B, the OLED material 112 of thefirst sub-pixel 108 a, the cathode 114, and the encapsulation layer 116are deposited. In embodiments including capping layers, the cappinglayers are deposited between the cathode 114 and the encapsulation layer116. The capping layers may be deposited by evaporation deposition. Asfurther discussed in the corresponding description of FIG. 2, theshadowing effect of the inorganic overhang structures 110 define theOLED angle θ_(OLED) (shown in FIG. 2) of the OLED material 112 and thecathode angle θ_(cathode) (shown in FIG. 2) of the cathode 114. The OLEDangle θ_(OLED) of the OLED material 112 and the cathode angleθ_(cathode) of the cathode 114 result from evaporation deposition of theOLED material 112 and the cathode 114. In the first and secondconfigurations, the OLED material 112 does not contact and the cathode114 contacts the lower portion 110A of the inorganic overhang structures110. In the third and fourth configurations, the OLED material 112 doesnot contact the lower portion 110A and the assistant cathode 202, andthe cathode 114 contacts at least the assistant cathode 202. Theencapsulation layer 116 is deposited over the cathode 114.

At operation 603, as shown in FIG. 7C, a resist 702 is formed in a well704 of the first sub-pixel 108 a. At operation 604, as shown in FIGS. 7Eand 7F, the encapsulation layer 116, the cathode 114, and the OLEDmaterial 112 exposed by the resist 702 are removed. The encapsulationlayer 116, the cathode 114, and the OLED material 112 exposed by resist702 may be removed by wet etch processes. According to embodiments withthe plugless arrangement 101A of the sub-pixel circuit 100, the resist408 is removed, as shown in FIG. 7E. According to embodiments with theplug arrangement 101B of the sub-pixel circuit 100, the resist 702 iscorresponds to the plug 122 of the first sub-pixel 108 a, as shown inFIGS. 7D and 7F.

At operation 605, as shown in FIGS. 7G and 7H, the OLED material 112 ofthe second sub-pixel 108 b, the cathode 114, and the encapsulation layer116 are deposited. In embodiments including capping layers, the cappinglayers are deposited between the cathode 114 and the encapsulation layer116. The capping layers may be deposited by evaporation deposition. Theshadowing of the overhang 109 provides for evaporation deposition eachof the OLED material 112 and a cathode 114. As further discussed in thecorresponding description of FIG. 2, the shadowing effect of theinorganic overhang structures 110 define the OLED angle θ_(OLED) (shownin FIG. 2) of the OLED material 112 and the cathode angle θ_(cathode)(shown in FIG. 2) of the cathode 114. The OLED angle θ_(OLED) of theOLED material 112 and the cathode angle θ_(cathode) Of the cathode 114result from evaporation deposition of the OLED material 112 and thecathode 114. In the first and second configurations, the OLED material112 does not contact and the cathode 114 contacts the lower portion 110Aof the inorganic overhang structures 110. In the third and fourthconfigurations, the OLED material 112 does not contact the lower portion110A and the assistant cathode 202, and the cathode 114 contacts atleast the assistant cathode 202. The encapsulation layer 116 isdeposited over the cathode 114.

At operation 606, as shown in FIG. 4L, a resist 704 is formed in a well706 of the second sub-pixel 108 b. At operation 607, as shown in FIGS.7K and 7L, the encapsulation layer 116, the cathode 114, and the OLEDmaterial 112 exposed by the resist 416 are removed. The encapsulationlayer 116, the cathode 114, and the OLED material 112 exposed by resist706 may be removed by wet etch processes. According to embodiments withthe plugless arrangement 101A of the sub-pixel circuit 100, the resist706 is removed, as shown in FIG. 7K. According to embodiments with theplug arrangement 101B of the sub-pixel circuit 100, the resist 706corresponds to the plug 122 of the second sub-pixel 108 b, as shown inFIGS. 7J and 7L. Operations 601-607 described herein form the sub-pixelcircuit 100 including two or more sub-pixels 106. Operations 605-607 maybe repeated for each addition sub-pixel, e.g. for a third and/or afourth sub-pixel.

In summation, described herein relate to sub-pixel circuits and methodsof forming sub-pixel circuits that may be utilized in a display such asan organic light-emitting diode (OLED) display. The adjacent inorganicoverhang structures defining each sub-pixel of the sub-pixel circuit ofthe display provide for formation of the sub-pixel circuit usingevaporation deposition and provide for the inorganic overhang structuresto remain in place after the sub-pixel circuit is formed (e.g.,utilizing the methods of the fifth, sixth, or seventh exemplaryembodiments). Evaporation deposition may be utilized for deposition ofan OLED material and cathode. The inorganic overhang structures definedeposition angles, i.e., provide for a shadowing effect duringevaporation deposition, for each of the OLED material and the cathodesuch the OLED material does not contact the lower portion (and assistantcathode according to embodiments with the third and fourthconfigurations) and the cathode contacts the lower portion according tothe first and second configurations or at least the assistant cathode ofthe third and fourth configurations. The encapsulation layer of arespective sub-pixel is disposed over the cathode with the encapsulationlayer extending under at least a portion of each of the adjacentinorganic overhang structures and along a sidewall of each of theadjacent inorganic overhang structures.

While the foregoing is directed to embodiments of the presentdisclosure, other and further embodiments of the disclosure may bedevised without departing from the basic scope thereof, and the scopethereof is determined by the claims that follow.

What is claimed is:
 1. A method of forming a device, comprising:positioning a substrate having: an anode, a first opening of a firstsub-pixel defined by adjacent first inorganic overhang structuresdisposed on adjacent pixel-defining layer (PDL) structures disposed overthe substrate; depositing, at an OLED angle θ_(OLED) defined using thefirst inorganic overhang structures, a first OLED material over a firstportion and a second portion of the substrate using evaporationdeposition, the first portion corresponding to the first sub-pixel andthe second portion corresponding to a second sub-pixel; depositing, at acathode angle θ_(cathode) defined using the first inorganic overhangstructures, a first cathode over the first portion and the secondportion of the substrate using evaporation deposition, wherein the firstinorganic overhang structures are used in defining evaporationdeposition angles of the OLED angle θ_(OLED) and the cathode angleθ_(cathode); depositing a first encapsulation layer over the firstcathode and over the first portion and the second portion of thesubstrate such that the first sub-pixel comprises: the first OLEDmaterial, as deposited according to the OLED angle θ_(OLED) defined bythe first inorganic overhang structures, extending under first andsecond extensions of an upper portion of the first inorganic overhangstructures and having an OLED edge disposed laterally past an undersideedge of the upper portion and over one of the PDL structures; and thefirst cathode, as deposited according to the cathode angle θ_(cathode)defined by the first inorganic overhang structures, extending under thefirst and second extensions of the upper portion of the first inorganicoverhang structures and past the OLED edge, the first cathode having acathode edge contacting a lower portion of one of the inorganic overhangstructures; forming a first resist in the first opening of the firstsub-pixel; removing the first OLED material, the first cathode, and thefirst encapsulation layer over the second portion exposed by the firstresist; forming a second opening of a second sub-pixel defined byadjacent second inorganic overhang structures disposed on the PDLstructures disposed over the substrate; depositing, at the OLED angleθ_(OLED) defined using the second inorganic overhang structures, asecond OLED material over the first portion and the second portion ofthe substrate using evaporation deposition; depositing, at a cathodeangle θ_(cathode) defined using the second inorganic overhangstructures, a second cathode over the first portion and the secondportion of the substrate using evaporation deposition, wherein thesecond inorganic overhang structures are used in defining evaporationdeposition angles of the OLED angle θ_(OLED) and the cathode angleθ_(cathode); depositing a second encapsulation layer over the secondcathode and over the first portion and the second portion of thesubstrate such that the second sub-pixel comprises: the second OLEDmaterial, as deposited according to the OLED angle θ_(OLED) defined bythe second inorganic overhang structures, extending under first andsecond extensions of an upper portion of the second inorganic overhangstructures and having an OLED edge disposed laterally past the undersideedge of the upper portion and over one of the PDL structures; and thesecond cathode, as deposited according to the cathode angle θ_(cathode)defined by the second inorganic overhang structures, extending under thefirst and second extensions of the upper portion of the second inorganicoverhang structures and past the OLED edge, the second cathode having acathode edge contacting a lower portion of one of the second inorganicoverhang structures; and removing the second OLED material, the secondcathode, and the second encapsulation layer over the first portion. 2.The method of claim 1, wherein the lower portion comprises a firstcomposition.
 3. The method of claim 2, wherein each of the firstinorganic overhang structure comprises one of: the upper portion of anon-conductive inorganic material and the lower portion of a conductiveinorganic material, the first cathode extending under the underside edgeand contacting the conductive inorganic material of the firstcomposition of the lower portion at one of first and second sidewalls ofthe lower portion; the upper portion of the conductive inorganicmaterial and the lower portion of the conductive inorganic material, thefirst cathode extending under the underside edge and contacting theconductive inorganic material of the first composition of the lowerportion at one of the first and second sidewalls of the lower portion;the upper portion of the non-conductive inorganic material, the lowerportion of the non-conductive inorganic material, and an assistantcathode disposed under the lower portion, the cathode extending underthe underside edge and contacting a top surface of the assistant cathodeof the first composition; or the upper portion of the conductiveinorganic material, the lower portion of the non-conductive inorganicmaterial, and the assistant cathode disposed under the lower portion,the cathode extending under the underside edge and contacting the topsurface of the assistant cathode of the first composition.
 4. The methodof claim 3, wherein the first OLED material and the first cathodedeposited using evaporation deposition are deposited over: a first wellof the first sub-pixel defined by the first inorganic overhangstructures of the first sub-pixel; and an upper layer having a secondcomposition disposed over the second sub-pixel to be formed, wherein:the first OLED material is disposed over one of the PDL structures ofthe first sub-pixel; and the first cathode extends under the undersideedge and contacts the lower portion having the first composition at thefirst and second sidewalls of the lower portion or the top surface ofthe assistant cathode of the first inorganic overhang structures of thefirst sub-pixel.
 5. The method of claim 3, wherein the first OLEDmaterial and the first cathode deposited using evaporation depositionare deposited over: a first well of the first sub-pixel defined by thefirst inorganic overhang structures of the first sub-pixel; and thefirst resist disposed in a second well of the second sub-pixel, wherein:the first OLED material is disposed over one of the PDL structures ofthe first sub-pixel; and the first cathode extends under the undersideedge of one of the first inorganic overhang structures and contacts thelower portion having the first composition at the first and secondsidewalls of the lower portion or the top surface of the assistantcathode of the first inorganic overhang structures of the firstsub-pixel.
 6. The method of claim 5, wherein: a second resist isdisposed in the first well of the first sub-pixel; and the second OLEDmaterial and the second cathode deposited using evaporation depositionare deposited over: the second resist disposed in the first well of thefirst sub-pixel; and a second well of the second sub-pixel defined bythe second inorganic overhang structures of the second sub-pixel,wherein: the second OLED material is disposed over one of the PDLstructures of the second sub-pixel; and the second cathode extends underthe underside edge and contacts the lower portion having the firstcomposition at the first and second sidewalls or the top surface of theassistant cathode of the second inorganic overhang structures of thesecond sub-pixel.
 7. The method of claim 3, wherein the firstencapsulation layer extends: to contact the first composition at thefirst and second sidewalls of the lower portion of the first inorganicoverhang structures of the first sub-pixel; to contact a secondcomposition of the upper portion of the first inorganic overhangstructures at an underside surface of the first and second extensions ofthe first inorganic overhang structures of the first sub-pixel; and overat least a first portion of an uppermost surface of the upper portion ofthe first inorganic overhang structures of the first sub-pixel.
 8. Themethod of claim 7, further comprising: depositing a second encapsulationlayer over the second cathode of a second sub-pixel, wherein the secondencapsulation layer extends: to contact the first composition at thefirst and second sidewalls of the lower portion of the second inorganicoverhang structures of the second sub-pixel; to contact the secondcomposition of the upper portion of the second inorganic overhangstructures at the underside surface of the first and second extensionsof the second inorganic overhang structures of the second sub-pixel; andover at least a second portion of the uppermost surface of the upperportion of the second inorganic overhang structures of the secondsub-pixel.
 9. The method of claim 8, further comprising: depositing afirst plug over the first encapsulation layer, the first plug having afirst plug transmittance that is matched or substantially matched to afirst OLED transmittance of the first OLED material of the firstsub-pixel; and depositing a second plug over the second encapsulationlayer, the second plug having a second plug transmittance that ismatched or substantially matched to a second OLED transmittance of thesecond OLED material of the second sub-pixel.
 10. The method of claim 9,wherein at least one of the first plug or the second plug include aphotoresist, a color filter, or a photosensitive monomer material. 11.The method of claim 8, further comprising a global passivation layerdisposed over the first inorganic overhang structures, the secondinorganic overhang structures, the first encapsulation layer, and thesecond encapsulation layer.
 12. The method of claim 1, wherein: the OLEDangle θ_(OLED) is defined by the upper portion of the first inorganicoverhang structures between an OLED vector and an overhang vector, theoverhang vector defined by the underside edge of the first and secondextensions and a respective PDL structure, the OLED vector defined bythe OLED edge under the first and second extensions and the undersideedge; and the first cathode forms the cathode angle θ_(cathode) isdefined by the upper portion of the first inorganic overhang structuresbetween a cathode vector and the overhang vector, the cathode vectordefined by the cathode edge under the first and second extensions andthe underside edge.
 13. The method of claim 1, wherein the substrate isa pre-patterned indium tin oxide (ITO) glass substrate.
 14. The methodof claim 1, wherein the first OLED material comprises a hole injectionlayer (HIL), a hole transport layer (HTL), an emissive layer (EML), andan electron transport layer (ETL).
 15. The method of claim 1, whereinthe first OLED material comprises a first hole injection layer (HIL) anda subsequent layer disposed over the first HIL layer, and depositing thefirst HIL layer comprises: depositing, at a HIL angle θ_(HIL) definedusing the first inorganic overhang structures, a first HIL material overthe substrate using evaporation deposition, the first HIL materialextending under the first and second extensions of the upper portion ofthe first inorganic overhang structures and having a HIL edge disposedlaterally past the underside edge of the upper portion and over one ofthe PDL structures, wherein the OLED edge of the subsequent layer of thefirst OLED material extends past the HIL edge.
 16. A method of forming adevice, comprising: positioning a substrate having: an anode, a firstopening of a first sub-pixel defined by adjacent first inorganicoverhang structures disposed on pixel-defining layer (PDL) structuresdisposed over the substrate; depositing, at an OLED angle θ_(OLED)defined using the first inorganic overhang structures, a first OLEDmaterial over a first portion and a second portion of the substrateusing evaporation deposition, the first portion corresponding to thefirst sub-pixel and the second portion corresponding to a secondsub-pixel; depositing, at a cathode angle θ_(cathode) defined using thefirst inorganic overhang structures, a first cathode over the firstportion and the second portion of the substrate using evaporationdeposition, wherein the first inorganic overhang structures are used indefining evaporation deposition angles of the OLED angle θ_(OLED) andthe cathode angle θ_(cathode); depositing a first encapsulation layerover the first cathode and over the first portion and the second portionof the substrate such that the first sub-pixel comprises: the first OLEDmaterial, as deposited according to the OLED angle θ_(OLED) defined bythe first inorganic overhang structures, extending under first andsecond extensions of an upper portion of the first inorganic overhangstructures and having an OLED edge disposed laterally past an undersideedge of the upper portion and over one of the PDL structures; the firstcathode extending under the first and second extensions of the upperportion of the first inorganic overhang structures and past the OLEDedge, the first cathode having a cathode edge contacting a lower portionof one of the first inorganic overhang structures; and the firstencapsulation layer over the first cathode of the first sub-pixel,wherein the first encapsulation layer extends: to contact a firstcomposition at first and second sidewalls of the lower portion of thefirst inorganic overhang structures of the first sub-pixel; to contact asecond composition of the upper portion of the first inorganic overhangstructures at an underside surface of the first and second extensions ofthe first inorganic overhang structures of the first sub-pixel; and overat least a first portion of an uppermost surface of the upper portion ofthe first inorganic overhang structures of the first sub-pixel forming aresist in the first opening of the first sub-pixel; removing the firstOLED material, the first cathode, and the first encapsulation layer overthe second portion exposed by the resist; forming a second opening of asecond sub-pixel defined by adjacent second inorganic overhangstructures disposed on the PDL structures disposed over the substrate;depositing, at the OLED angle θ_(OLED) defined using the secondinorganic overhang structures, a second OLED material over the firstportion and the second portion of the substrate using evaporationdeposition; depositing, at the cathode angle θ_(cathode) defined usingthe second inorganic overhang structures, a second cathode over thefirst portion and the second portion of the substrate using evaporationdeposition, wherein the second inorganic overhang structures are used indefining evaporation deposition angles of the OLED angle θ_(OLED) andthe cathode angle θ_(cathode); depositing a second encapsulation layerover the second cathode and over the first portion and the secondportion of the substrate such that the second sub-pixel comprises: thesecond OLED material, as deposited according to the OLED angle θ_(OLED)defined by the second inorganic overhang structures, extending underfirst and second extensions of the upper portion of the second inorganicoverhang structures and having the OLED edge disposed laterally past theunderside edge of the upper portion and over one of the PDL structures;and the second cathode extending under the first and second extensionsof the upper portion of the second inorganic overhang structures andpast the OLED edge, the second cathode having a cathode edge contactinga lower portion of one of the second inorganic overhang structures; andthe second encapsulation layer over the second cathode of the secondsub-pixel; and removing the second OLED material, the second cathode,and the second encapsulation layer over the first portion.
 17. Themethod of claim 16, wherein the second encapsulation layer extends: tocontact a first composition at first and second sidewalls of the lowerportion of the second inorganic overhang structures of the secondsub-pixel; to contact a second composition of the upper portion of thesecond inorganic overhang structures at the underside surface of thefirst and second extensions of the second inorganic overhang structuresof the second sub-pixel; and over at least a second portion of theuppermost surface of the upper portion of the second inorganic overhangstructures of the second sub-pixel.
 18. The method of claim 16, whereinthe lower portion of the first inorganic overhang structures comprises afirst composition.
 19. The method of claim 16, wherein: the OLED angleθ_(OLED) is defined by the upper portion of the first inorganic overhangstructures between an OLED vector and an overhang vector, the overhangvector defined by the underside edge of the first and second extensionsand a respective PDL structure, the OLED vector defined by the OLED edgeunder the first and second extensions and the underside edge; and thefirst cathode forms the cathode angle θ_(cathode) is defined by theupper portion of the first inorganic overhang structures between acathode vector and the overhang vector, the cathode vector defined bythe cathode edge under the first and second extensions and the undersideedge.
 20. A method of forming a device, comprising: positioning asubstrate having: an anode, a first opening of a first sub-pixel definedby adjacent first inorganic overhang structures disposed onpixel-defining layer (PDL) structures disposed over the substrate; and asecond opening of a second sub-pixel defined by adjacent secondinorganic overhang structures disposed on the PDL structures; forming aresist in the first opening of the first sub-pixel; depositing, at anOLED angle θ_(OLED) defined using the first inorganic overhangstructures, a first OLED material over a first portion and a secondportion of the substrate using evaporation deposition, the first portioncorresponding to the first sub-pixel and the second portioncorresponding to the second sub-pixel; and depositing, at a cathodeangle θ_(cathode) defined using the first inorganic overhang structures,a first cathode over the first portion and the second portion of thesubstrate using evaporation deposition, wherein the first inorganicoverhang structures are used in defining evaporation deposition anglesof the OLED angle θ_(OLED) and the cathode angle θ_(cathode); depositinga first encapsulation layer over the first cathode and over the firstportion and the second portion of the substrate such that the firstsub-pixel comprises: the first OLED material, as deposited according tothe OLED angle θ_(OLED) defined by the first inorganic overhangstructures, extending under first and second extensions of an upperportion of the first inorganic overhang structures and having an OLEDedge disposed laterally past an underside edge of the upper portion andover one of the PDL structures; the first cathode, as depositedaccording to the cathode angle θ_(cathode) defined by the firstinorganic overhang structures, extending under the first and secondextensions of the upper portion of the first inorganic overhangstructures and past the OLED edge, the first cathode having a cathodeedge contacting a lower portion of one of the first inorganic overhangstructures; and the first encapsulation layer over the first cathode;and removing the first OLED material, the first cathode, and the firstencapsulation layer over the second portion exposed by the resist, andremoving the resist; depositing, at the OLED angle θ_(OLED) definedusing the second inorganic overhang structures, a second OLED materialover the first portion and the second portion of the substrate usingevaporation deposition; depositing, at the cathode angle θ_(cathode)defined using the second inorganic overhang structures, a second cathodeover the first portion and the second portion of the substrate usingevaporation deposition, wherein the second inorganic overhang structuresare used in defining evaporation deposition angles of the OLED angleθ_(OLED) and the cathode angle θ_(cathode); depositing a secondencapsulation layer over the second cathode and over the first portionand the second portion of the substrate such that the second sub-pixelcomprises: the second OLED material, as deposited according to the OLEDangle θ_(OLED) defined by the second inorganic overhang structures,extending under first and second extensions of the upper portion of thesecond inorganic overhang structures and having the OLED edge disposedlaterally past the underside edge of the upper portion and over one ofthe PDL structures; the second cathode extending under the first andsecond extensions of the upper portion of the second inorganic overhangstructures and past the OLED edge, the second cathode having a cathodeedge contacting a lower portion of one of the second inorganic overhangstructures; and the second encapsulation layer over the second cathodeof the second sub-pixel; and removing the second OLED material, thesecond cathode, and the second encapsulation layer over the firstportion.
 21. A method of forming a device, comprising: positioning asubstrate having: an anode, a first opening of a first sub-pixel definedby adjacent first inorganic overhang structures disposed onpixel-defining layer (PDL) structures disposed over the substrate; and asecond opening of a second sub-pixel defined by adjacent secondinorganic overhang structures disposed on the PDL structures; forming aresist in the first opening of the first sub-pixel; depositing, at a HILangle θ_(HIL) defined using the first inorganic overhang structures, afirst HIL layer over a first portion and a second portion of thesubstrate using evaporation deposition, the first portion correspondingto the first sub-pixel and the second portion corresponding to thesecond sub-pixel; depositing, at an OLED angle θ_(OLED) defined usingthe first inorganic overhang structures, a first OLED layer over thefirst portion and the second portion of the substrate using evaporationdeposition; and depositing, at a cathode angle θ_(cathode) defined usingthe first inorganic overhang structures, a first cathode over the firstportion and the second portion of the substrate using evaporationdeposition, wherein the first inorganic overhang structures are used indefining evaporation deposition angles of the HIL angle θ_(HIL), OLEDangle θ_(OLED), and the cathode angle θ_(cathode); depositing a firstencapsulation layer over the first cathode and over the first portionand the second portion of the substrate such that the first sub-pixelcomprises: the first HIL layer, as deposited according to the HIL angleθ_(HIL) defined by the first inorganic overhang structures, extendingunder first and second extensions of an upper portion of the firstinorganic overhang structures and having a HIL edge laterally past anunderside edge of the upper portion and over one of the PDL structures;the first OLED layer, as deposited according to the OLED angle θ_(OLED)defined by the first inorganic overhang structures, extending under thefirst and second extensions of the upper portion of the first inorganicoverhang structures and having an OLED edge disposed laterally past theunderside edge of the upper portion and over one of the PDL structures,wherein the OLED edge extends past the HIL edge under the first andsecond extensions of the upper portion; and the first cathode, asdeposited according to the cathode angle θ_(cathode) defined by thefirst inorganic overhang structures, extending under the first andsecond extensions of the upper portion of the first inorganic overhangstructures and past the OLED edge, the first cathode having a cathodeedge contacting a lower portion of one of the first inorganic overhangstructures; removing the first HIL layer, the first OLED layer, thefirst cathode, and the first encapsulation layer over the second portionexposed by the resist, and removing the resist; depositing, at the HILangle θ_(HIL) defined using the second inorganic overhang structures, asecond HIL layer over the first portion and the second portion of thesubstrate using evaporation deposition; depositing, at the OLED angleθ_(OLED) defined using the second inorganic overhang structures, asecond OLED layer over the first portion and the second portion of thesubstrate using evaporation deposition; depositing, at a cathode angleθ_(cathode) defined using the second inorganic overhang structures, asecond cathode over the first portion and the second portion of thesubstrate using evaporation deposition, wherein the second inorganicoverhang structures are used in defining evaporation deposition anglesof the HIL angle θ_(HIL), OLED angle θ_(OLED), and the cathode angleθ_(cathode); depositing a second encapsulation layer over the secondcathode and over the first portion and the second portion of thesubstrate such that the second sub-pixel comprises: the second HILlayer, as deposited according to the HIL angle θ_(HIL) defined by thesecond inorganic overhang structures, extending under first and secondextensions of an upper portion of the second inorganic overhangstructures and having a HIL edge laterally past an underside edge of theupper portion and over one of the PDL structures; the second OLED layer,as deposited according to the OLED angle θ_(OLED) defined by the secondinorganic overhang structures, extending under first and secondextensions of the upper portion of the second inorganic overhangstructures and having the OLED edge disposed laterally past theunderside edge of the upper portion and over one of the PDL structures;the second cathode extending under the first and second extensions ofthe upper portion of the second inorganic overhang structures and pastthe OLED edge, the second cathode having a cathode edge contacting alower portion of one of the second inorganic overhang structures; andremoving the second HIL layer, the second OLED layer, the secondcathode, and the second encapsulation layer over the first portion.